Micro- and nanoelectromechanical systems (M/NEMS) technology offers miniaturized systems with dimensions ranging from few nanometers in length to over thousand micrometers. Microsystems have been used in a wide range of applications from inkjet printers to cancer detection. The advancement of M/NEMS technology in the past decades have resulted in development of novel materials such as graphene and CNT, new manufacturing processes and many innovative devices and integrated systems. M/NEMS provide a range of unique advantages over macro-scale counterparts such as high accuracy and sensitivity, rapid response, extremely low cost and energy consumption and the ability to be integrated with IC electronics. Microsystems research has covered many areas such as consumer products, transportation, medicine, aerospace, military, environmental science and food and agriculture. M/NEMS devices are often used as sensors, actuators, integrated filters and logic circuits, energy harvesting and storage systems, and many other integrated systems.

Frontiers in Mechanical Engineering offers a special collection for M/NEMS technology and the goal of this collection is to create a platform for researchers to present their findings in different areas of sensing technology. The topics covered by this special issue includes but not limited to design, modeling and simulation, material and fabrication process development, and proof of concept of M/NEMS sensors and sensing integrated systems. We accept manuscripts in the following areas of sensing technology:

• Micro- and nano-sensors:

• Physical sensors such as force, acceleration, pressure and temperature sensors:

o The sensors may use a range of transduction mechanisms such as electrostatic, piezoelectric, piezoresistive, inertial, surface acoustic wave (SAW), optical etc.

• Chemical sensors such as gas and humidity sensors.

• Biological sensors for detection of a wide range of biological agents including cells, bacteria and viruses, proteins and enzymes, RNA/DNA etc.

• Modeling and simulation of sensors using coupled-field multiphysics analytical and FEM tools.

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Frontiers in Mechanical Engineering

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