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ORIGINAL RESEARCH article

Adv. Opt. Technol.
Sec. Optical Manufacturing and Design
Volume 14 - 2025 | doi: 10.3389/aot.2025.1511907
This article is part of the Research Topic Advanced Fabrication Techniques for High-Precision Optical Components View all articles

Electromagnetic deformable mirror fabricated using silicon micromachining and stress-resilient assembly

Provisionally accepted
Thomas Bifano Thomas Bifano *Wenkuan Kevin Man Wenkuan Kevin Man
  • Boston University, Boston, United States

The final, formatted version of the article will be published soon.

    This work presents a prototype electromagnetic actuation deformable mirror assembly with stressresilient face sheet design. The new face sheet design has been proven to reduce unpowered face sheet surface distortion caused by actuator adhesion stress. The assembled deformable mirror prototype allowed bi-directional actuation with total stroke exceeding 20 µm. A two-step control method was used to improve the prototype dynamic performance, allowing settling time on the order of 1 ms. Prescribed references shapes were made on the prototype deformable mirror using closed-loop control.

    Keywords: Adaptive optics, deformable mirror (DM), Precision optical fabrication, MEMS, Precision assembly

    Received: 15 Oct 2024; Accepted: 02 Jan 2025.

    Copyright: © 2025 Bifano and Man. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) or licensor are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms.

    * Correspondence: Thomas Bifano, Boston University, Boston, United States

    Disclaimer: All claims expressed in this article are solely those of the authors and do not necessarily represent those of their affiliated organizations, or those of the publisher, the editors and the reviewers. Any product that may be evaluated in this article or claim that may be made by its manufacturer is not guaranteed or endorsed by the publisher.