AUTHOR=Man Wenkuan (Kevin) , Bifano Thomas 

TITLE=Electromagnetic deformable mirror fabricated using silicon micromachining and stress-resilient assembly

JOURNAL=Advanced Optical Technologies

VOLUME=14

YEAR=2025

URL=https://www.frontiersin.org/journals/advanced-optical-technologies/articles/10.3389/aot.2025.1511907

DOI=10.3389/aot.2025.1511907

ISSN=2192-8584