AUTHOR=Tian Yi , Shao Yabin TITLE=Mini-review on periodic properties of MEMS oscillators JOURNAL=Frontiers in Physics VOLUME=12 YEAR=2024 URL=https://www.frontiersin.org/journals/physics/articles/10.3389/fphy.2024.1498185 DOI=10.3389/fphy.2024.1498185 ISSN=2296-424X ABSTRACT=

This paper features a survey of the periodic property of micro-electro-mechanical systems by the homotopy perturbation method, the variational iteration method, the variational theory, He’s frequency formulation, and Taylor series method. Fractal MEMS systems are also introduced, and future prospective is elucidated. The emphasis of this min-review article is put mainly on the developments in last decade, so the references, therefore, are not exhaustive.