AUTHOR=Lin Bailin , Dai Wei , Sun Jun , Xiao Mengting , He Zihan , Wu Jianjian , Chen Xinqi TITLE=Micro-Movement Measured by Laser Heterodyne Interferometer Based on Acousto-Optic Effect JOURNAL=Frontiers in Physics VOLUME=10 YEAR=2022 URL=https://www.frontiersin.org/journals/physics/articles/10.3389/fphy.2022.890194 DOI=10.3389/fphy.2022.890194 ISSN=2296-424X ABSTRACT=

In this experiment, the stable output of a dual-frequency laser source is obtained by an acousto-optic modulator due to the Bragg diffraction effect. Furthermore, the non-polarized dual-laser heterodyne interferometer is designed to measure the micro-movement of stacked piezoelectric (PZT) ceramic. This micro-movement can be dynamically determined by comparing the phase difference between the conference beam and measuring beam. The results indicate that the micro-movement of PZT ceramic changes linearly with the driven-voltage in the range of 0–30 V and the sensitivity of movement to voltage is 58.3 nm/V, which is very close to the theoretical value and this laser heterodyne interferometer can be applied for calibrating parameters of PZT ceramic.