AUTHOR=Kato Yasuhiro X., Furukawa Shigeto , Samejima Kazuyuki , Hironaka Naoyuki , Kashino Makio TITLE=Photosensitive-polyimide based method for fabricating various neural electrode architectures JOURNAL=Frontiers in Neuroengineering VOLUME=5 YEAR=2012 URL=https://www.frontiersin.org/journals/neuroengineering/articles/10.3389/fneng.2012.00011 DOI=10.3389/fneng.2012.00011 ISSN=1662-6443 ABSTRACT=
An extensive photosensitive-polyimide (PSPI)-based method for designing and fabricating various neural electrode architectures was developed. The method aims to broaden the design flexibility and expand the fabrication capability for neural electrodes to improve the quality of recorded signals and integrate other functions. After characterizing PSPI's properties for micromachining processes, we successfully designed and fabricated various neural electrodes even on a non-flat substrate using only one PSPI as an insulation material and without the time-consuming dry etching processes. The fabricated neural electrodes were an electrocorticogram (ECoG) electrode, a mesh intracortical electrode with a unique lattice-like mesh structure to fixate neural tissue, and a guide cannula electrode with recording microelectrodes placed on the curved surface of a guide cannula as a microdialysis probe.