AUTHOR=Becher Malte J. M. J. , Jagosz Julia , Bock Claudia , Ostendorf Andreas , Gurevich Evgeny L. 

TITLE=Formation of low- and high-spatial frequency laser-induced periodic surface structures (LIPSSs) in ALD-deposited MoS2

JOURNAL=Frontiers in Nanotechnology

VOLUME=5

YEAR=2023

URL=https://www.frontiersin.org/journals/nanotechnology/articles/10.3389/fnano.2023.1227025

DOI=10.3389/fnano.2023.1227025

ISSN=2673-3013

ABSTRACT=<p>The formation of laser-induced periodic surface structures (LIPSSs) on the atomic layer-deposited (ALD) molybdenum disulfide (MoS<sub>2</sub>) upon femtosecond laser processing is studied experimentally. Laser-processing parameters such as average laser power and the scan speed at which the formation of the periodic nanostructures takes place are identified. Optical and scanning electron microscopy are applied to identify the parameter regions for the different LIPSS formations and transitions between them. High- and low-spatial frequency LIPSS (HSFL and LSFL) with two distinct periods <italic>λ</italic><sub><italic>LSFL</italic></sub> ≈ 1.1 <italic>μm</italic> and <italic>λ</italic><sub><italic>HSFL</italic></sub> ≈ 83 <italic>nm</italic> can be observed. The HSFL are dominating at higher and the LSFL at lower laser average powers. Formation of LIPSS is found to inhibit laser ablation at lower scan speeds.</p>