AUTHOR=Villanueva Luis Guillermo , Bausells Joan , Brugger Juergen 

TITLE=Grand Challenge in N/MEMS

JOURNAL=Frontiers in Mechanical Engineering

VOLUME=1

YEAR=2016

URL=https://www.frontiersin.org/journals/mechanical-engineering/articles/10.3389/fmech.2015.00015

DOI=10.3389/fmech.2015.00015

ISSN=2297-3079