AUTHOR=Hörich Florian , Lüttich Christopher , Grümbel Jona , Bläsing Jürgen , Feneberg Martin , Dadgar Armin , Goldhahn Rüdiger , Strittmatter André 

TITLE=Epitaxial growth of transition metal nitrides by reactive sputtering

JOURNAL=Frontiers in Materials

VOLUME=12

YEAR=2025

URL=https://www.frontiersin.org/journals/materials/articles/10.3389/fmats.2025.1507123

DOI=10.3389/fmats.2025.1507123

ISSN=2296-8016