AUTHOR=Tian Wang , Zhang Dong-liang , Zheng Xian-tong , Yang Ruo-ke , Liu Yuan , Lu Li-dan , Zhu Lian-qing 

TITLE=MBE growth and optimization of the InGaAs/InAlAs materials system for quantum cascade laser

JOURNAL=Frontiers in Materials

VOLUME=9

YEAR=2022

URL=https://www.frontiersin.org/journals/materials/articles/10.3389/fmats.2022.1050205

DOI=10.3389/fmats.2022.1050205

ISSN=2296-8016

ABSTRACT=<p>High material quality is the foundation for the excellent performance of quantum cascade lasers. This paper investigates the growth conditions for InGaAs/InAlAs/InP superlattices combined solid-source molecular beam epitaxy with metal-organic chemical vapor deposition. Based on the optimization of growth conditions of InGaAs buffer epilayers, the effects of the growth temperature, interruption time, and V/III flux ratio on the quality of InGaAs/InAlAs/InP superlattices were systematically investigated. High-resolution x-ray diffraction and atomic force microscopy prove that this optimized InP-based superlattice has excellent periodicity and sharp interfaces.</p>