AUTHOR=Li Wanrong , Tan Xing Yan , Park Yeong Min , Shin Dong Chul , Kim Dae Weon , Kim Tae Gyu 

TITLE=Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD

JOURNAL=Frontiers in Materials

VOLUME=7

YEAR=2020

URL=https://www.frontiersin.org/journals/materials/articles/10.3389/fmats.2020.00201

DOI=10.3389/fmats.2020.00201

ISSN=2296-8016

ABSTRACT=<p>Diamond-like carbon (DLC) film doped with boron has unique properties and displays higher thermal resistance, lower internal stress, and better electrical conductivity than un-doped DLC film; this makes it is suitable for various applications, especially in outer space. Radio-frequency plasma-enhanced chemical vacuum deposition of boron-doped DLC film was performed to determine the optimal percentage of boron for improving thermal resistance. Additional heat treatment and 40 vol% B<sub>2</sub>H<sub>6</sub>/CH<sub>4</sub> yielded the best electrical conductivity. X-ray photoelectron spectroscopy, thermal gravimetric analysis, Raman spectroscopy, and the four-point probe method were utilized to analyze the properties of boron-doped DLC film. The boron-doped DLC film displayed outstanding performance in terms of thermal resistance and electrical conductivity.</p>