AUTHOR=Xu Rui , Zhou Zhongchao , Li Jing , Zhang Xu , Zhu Yuanyuan , Xiao Hongping , Xu Lina , Ding Yihong , Li Aidong , Fang Guoyong 

TITLE=Corrigendum: Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water

JOURNAL=Frontiers in Chemistry

VOLUME=10

YEAR=2022

URL=https://www.frontiersin.org/journals/chemistry/articles/10.3389/fchem.2022.1118819

DOI=10.3389/fchem.2022.1118819

ISSN=2296-2646