AUTHOR=Henkel Sebastian , Binder Marcel , Knauf Monique , Bliedtner Jens , Rädlein Edda TITLE=Influence of ultrasonic tool oscillation during drilling of fused silica JOURNAL=Advanced Optical Technologies VOLUME=13 YEAR=2024 URL=https://www.frontiersin.org/journals/advanced-optical-technologies/articles/10.3389/aot.2024.1513056 DOI=10.3389/aot.2024.1513056 ISSN=2192-8584